Semantic Scholar Open Access 2002 2690 sitasi

Fundamentals of Microfabrication

M. Madou

Abstrak

Road Map .- Lithography .- Pattern Transfer: Dry Etching, Deposition, and Doping .- Wet Bulk Micromachining .- Dry Bulk Micromachining .- Surface Micromachining .- LIGA .- Alternative Micromachining Technologies .- Electronics Used with Micromachined Devices .- Bonding and Packaging .- Quantum Structures and Molecular Engineering .- Appendices.-

Topik & Kata Kunci

Engineering Materials Science

Penulis (1)

M. Madou

Format Sitasi

APA MLA BibTeX

Madou, M. (2002). Fundamentals of Microfabrication. https://doi.org/10.1201/9781482274004

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Informasi Jurnal

Tahun Terbit: 2002
Bahasa: en
Total Sitasi: 2690×
Sumber Database: Semantic Scholar
DOI: 10.1201/9781482274004
Akses: Open Access ✓