arXiv
Open Access
2008
Low Voltage Totally Free Flexible RF MEMS Switch With Anti-Stiction System
Salim Touati
Nicolas Lorphelin
Alexandre Kanciurzewski
Renaud Robin
A. -S. Rollier
+2 lainnya
Abstrak
This paper concerns a new design of RF MEMS switch combined with an innovative process which enable low actuation voltage (<5V) and avoid stiction. First, the structure described with principal design issues, the corresponding anti-stiction system is presented and FEM simulations are done. Then, a short description of the process flow based on two non polymer sacrificial layers. Finally, RF measurements are presented and preliminary experimental protocol and results of anti-stiction validation is detailed. Resulting RF performances are -30dB of isolation and -0.45dB of insertion loss at 10 GHz.
Topik & Kata Kunci
Penulis (7)
S
Salim Touati
N
Nicolas Lorphelin
A
Alexandre Kanciurzewski
R
Renaud Robin
A
A. -S. Rollier
O
Olivier Millet
K
Karim Segueni
Akses Cepat
Informasi Jurnal
- Tahun Terbit
- 2008
- Bahasa
- en
- Sumber Database
- arXiv
- Akses
- Open Access ✓