arXiv Open Access 2008

Characterization and Modeling of an Electro-thermal MEMS Structure

P. G. Szabo Vladimir Szekely

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Abstrak

Thermal functional circuits are an interesting and perspectivic group of the MEMS elements. A practical realization is called Quadratic Transfer Characteristic (QTC) element which driving principle is the Seebeck-effect. In this paper we present the analyses of a QTC element from different perspectives. To check the real behavior of the device, we measured a few, secondary properties of the structure which correspond to special behavior because these properties can not be easily derived from the main characteristics.

Topik & Kata Kunci

cs.OH

Penulis (2)

P. G. Szabo

Vladimir Szekely

Format Sitasi

APA MLA BibTeX

Szabo, P.G., Szekely, V. (2008). Characterization and Modeling of an Electro-thermal MEMS Structure. https://arxiv.org/abs/0805.0863

Akses Cepat

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Informasi Jurnal

Tahun Terbit: 2008
Bahasa: en
Sumber Database: arXiv
Akses: Open Access ✓