Semantic Scholar Open Access 2014 10 sitasi

Depth profile investigation of β-FeSi2 formed in Si(1 0 0) by high fluence implantation of 50 keV Fe ion and post-thermal vacuum annealing

Wickramaarachchige J. Lakshantha Venkata C. Kummari T. Reinert F. McDaniel B. Rout

Lihat Sumber DOI

Topik & Kata Kunci

Materials Science

Penulis (5)

Wickramaarachchige J. Lakshantha

Venkata C. Kummari

T. Reinert

F. McDaniel

B. Rout

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APA MLA BibTeX

Lakshantha, W.J., Kummari, V.C., Reinert, T., McDaniel, F., Rout, B. (2014). Depth profile investigation of β-FeSi2 formed in Si(1 0 0) by high fluence implantation of 50 keV Fe ion and post-thermal vacuum annealing. https://doi.org/10.1016/J.NIMB.2014.02.024

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Informasi Jurnal

Tahun Terbit: 2014
Bahasa: en
Total Sitasi: 10×
Sumber Database: Semantic Scholar
DOI: 10.1016/J.NIMB.2014.02.024
Akses: Open Access ✓