Performance Analysis and Numerical Modelling of Thinfilm sensor

Volatile Organic Compounds (VOC) sensing has prominence in the current environmental conditions. As we are using plenty of carbon-based compounds. The VOCs released like ethylene, Methylene, benzene, toluene, etc compounds released during the usage of perfumes paints, varnishes are having adverse effects on human health. A thinfilm sensor is designed for development in sensing these VOCs. In the present study, we model, simulate, and characterize a bio sensor using COMSOL simulation tool. The simulation findings demonstrated that the new cantilever structure can create greater stress than the triangular and rectangular structures while also improving the stress distribution. COMSOL Multiphysics is used to model the proposed construction. The analytical study of structural properties of the thinfilm sensor were studied. It was observed that the resistance variations due to stress are affecting the sensitivity of sensor. The effect of thickness variations of the thinfilm sensor in sensing VOC using Al as the sensing element is examined. Subsequently, the structural parameters of the sensor are optimized, which extensively progressed and improved sensitivity of the material. The fabricated thin films can be used for many applications like chemical sensor, biosensor, optical sensor etc.