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Semantic Scholar Open Access 2021 27 sitasi

Wideband 6 GHz RF Filters for Wi-Fi 6E Using a Unique BAW Process and Highly Sc-doped AlN Thin Film

D. Kim G. Moreno F. Bi M. Winters R. Houlden +2 lainnya
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Abstrak

A Wi-Fi 6E BAW filter with relative bandwidth of 12% (665 MHz at 5.5 GHz) and good rejection over the whole 6 GHz band (1200 MHz) is reported. The Wi-Fi 6E filters have much wider bandwidth than those of early Wi-Fi 5/6 filters. High coupling coefficient piezoelectric films, highly doped AlScN, are developed to realize such a wide bandwidth. A novel bulk acoustic wave device fabrication process that capable of utilizing wide variety of piezoelectric thin films is used to realize such a challenging filter. The resonators fabricated with the material show keff2 of 13.2% and maximum quality factor of 1789.

Penulis (7)

D

D. Kim

G

G. Moreno

F

F. Bi

M

M. Winters

R

R. Houlden

D

D. Aichele

J

J. Shealy

Format Sitasi

APA MLA BibTeX
Kim, D., Moreno, G., Bi, F., Winters, M., Houlden, R., Aichele, D. et al. (2021). Wideband 6 GHz RF Filters for Wi-Fi 6E Using a Unique BAW Process and Highly Sc-doped AlN Thin Film. https://doi.org/10.1109/IMS19712.2021.9574981

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Informasi Jurnal
Tahun Terbit
2021
Bahasa
en
Total Sitasi
27×
Sumber Database
Semantic Scholar
DOI
10.1109/IMS19712.2021.9574981
Akses
Open Access ✓