A review of optics-based methods for thickness and surface characterization of two-dimensional materials
Abstrak
Two-dimensional (2D) materials have attracted great attention because of their unique physical properties and versatile applications in electronics and photonics. Following the trends of large-area 2D materials-based devices and systems implementation, large-area, high-throughput thickness and surface characterization techniques are required. Optics-based thin film characterization techniques have promising advantages in fast characterization speed, contactless large-area probing, and highly accurate measurement results. In this review, we overview optics-based methods for thickness and surface characterization of various 2D materials, including the use of optical reflection contrast, Raman spectroscopy, photoluminescence, optical interference effects, phase-shifting interferometry, nonlinear optical harmonic generations, and spectroscopic ellipsometry.
Topik & Kata Kunci
Penulis (2)
Yeonghoon Jin
Kyoungsik Yu
Akses Cepat
- Tahun Terbit
- 2021
- Bahasa
- en
- Total Sitasi
- 14×
- Sumber Database
- Semantic Scholar
- DOI
- 10.1088/1361-6463/ac0f1f
- Akses
- Open Access ✓