Semantic Scholar Open Access 1979 677 sitasi

Ion- and electron-assisted gas-surface chemistry—An important effect in plasma etching

J. Coburn H. F. Winters

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Topik & Kata Kunci

Chemistry

Penulis (2)

J. Coburn

H. F. Winters

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Coburn, J., Winters, H.F. (1979). Ion- and electron-assisted gas-surface chemistry—An important effect in plasma etching. https://doi.org/10.1063/1.326355

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Informasi Jurnal

Tahun Terbit: 1979
Bahasa: en
Total Sitasi: 677×
Sumber Database: Semantic Scholar
DOI: 10.1063/1.326355
Akses: Open Access ✓