Semantic Scholar Open Access 2005 288 sitasi

High-Q UHF micromechanical radial-contour mode disk resonators

J.R. Clark W. Hsu Mohamed A. Abdelmoneum C. T. Nguyen

Lihat Sumber DOI

Topik & Kata Kunci

Materials Science

Penulis (4)

J.R. Clark

W. Hsu

Mohamed A. Abdelmoneum

C. T. Nguyen

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Clark, J., Hsu, W., Abdelmoneum, M.A., Nguyen, C.T. (2005). High-Q UHF micromechanical radial-contour mode disk resonators. https://doi.org/10.1109/JMEMS.2005.856675

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Informasi Jurnal

Tahun Terbit: 2005
Bahasa: en
Total Sitasi: 288×
Sumber Database: Semantic Scholar
DOI: 10.1109/JMEMS.2005.856675
Akses: Open Access ✓