Semantic Scholar Open Access 2001 5476 sitasi

High-κ gate dielectrics: Current status and materials properties considerations

G. Wilk R. Wallace J. Anthony

Topik & Kata Kunci

Penulis (3)

G

G. Wilk

R

R. Wallace

J

J. Anthony

Format Sitasi

Wilk, G., Wallace, R., Anthony, J. (2001). High-κ gate dielectrics: Current status and materials properties considerations. https://doi.org/10.1063/1.1361065

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Informasi Jurnal
Tahun Terbit
2001
Bahasa
en
Total Sitasi
5476×
Sumber Database
Semantic Scholar
DOI
10.1063/1.1361065
Akses
Open Access ✓