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Semantic Scholar Open Access 2000 431 sitasi

VHF free-free beam high-Q micromechanical resonators

Kun Wang Yinglei Ark-Chew Wong Clark Nguyễn
Lihat Sumber DOI

Topik & Kata Kunci

Materials Science

Penulis (5)

K

Kun Wang

Y

Yinglei

A

Ark-Chew Wong

C

Clark

N

Nguyễn

Format Sitasi

APA MLA BibTeX
Wang, K., Yinglei, Wong, A., Clark, Nguyễn (2000). VHF free-free beam high-Q micromechanical resonators. https://doi.org/10.1109/MEMSYS.1999.746871

Akses Cepat

Lihat di Sumber doi.org/10.1109/MEMSYS.1999.746871
Informasi Jurnal
Tahun Terbit
2000
Bahasa
en
Total Sitasi
431×
Sumber Database
Semantic Scholar
DOI
10.1109/MEMSYS.1999.746871
Akses
Open Access ✓