One-Dimensional High-Q Silicon Nanoparticle Chain Resonators for Refractive Index Sensing
Abstrak
Label-free optical biosensors using nanophotonic concepts have made substantial progress in the last few years due to their ability to realize fast, compact and cost-effective chemical detection devices. Among those, high refractive index dielectric Mie nanoresonators hold promise for deep miniaturization of bio-sensing devices while keeping high sensitivity and low dissipative losses. In this work, we report a high sensitivity and small footprint refractive index sensor based on this concept. The device consists of a one-dimensional chain of coupled silicon nanoresonators supporting high quality factor collective Mie modes. The measurements with aqueous glycerol solutions show a high sensitivity range of 420 – 440 nm/RIU and a maximum figure of merit of 2700 RIU -1 . Being fully compatible with standard CMOS processes and having a small sensing area of only 0.5×18.2 µm 2 , we believe this design, once arranged in arrays functionalized for different analytes, could become an attractive solution to realize lab-on-a-chip sensor arrays for high-performance, label-free multiplexing in a cost-effective way.
Penulis (10)
L. Ding
D. Eschimèse
T. Ang
D. Morits
H. Chu
S. Lim
C. Png
S. Gorelik
R. Paniagua‐Domínguez
A. Kuznetsov
Akses Cepat
- Tahun Terbit
- 2022
- Bahasa
- en
- Total Sitasi
- 7×
- Sumber Database
- Semantic Scholar
- DOI
- 10.1021/acsanm.1c03866
- Akses
- Open Access ✓