Semantic Scholar Open Access 1995 2558 sitasi

Imprint of sub-25 nm vias and trenches in polymers

S. Chou P. R. Krauss P. J. Renstrom

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Topik & Kata Kunci

Materials Science

S. Chou

P. R. Krauss

P. J. Renstrom

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Chou, S., Krauss, P.R., Renstrom, P.J. (1995). Imprint of sub-25 nm vias and trenches in polymers. https://doi.org/10.1063/1.114851

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