Semantic Scholar
Open Access
2021
1 sitasi
Lithium aluminosilicate glass-ceramics for low-temperature anodic sealing of MEMS sensors
R. Kleimanov
I. Komarevtsev
Y. Enns
Y. Akulshin
A. Korshunov
+3 lainnya
Abstrak
The results of a study of the anodic bonding parameters of transparent glass-ceramics based on lithium aluminosilicates which are promising as structural materials of MEMS and MOEMS sensors are presented. A comparison of the optical transmittance of these materials and classical for MEMS industry glasses has been carried out. The glass-ceramics electrical conductivity in a wide temperature range has been measured. The procedure of hermetic sealing of glass-ceramics by the anodic bonding at temperatures of 150 – 250 °C has been worked out. A prototype of glass-ceramic atomic cell has been fabricated.
Topik & Kata Kunci
Penulis (8)
R
R. Kleimanov
I
I. Komarevtsev
Y
Y. Enns
Y
Y. Akulshin
A
A. Korshunov
A
A. Shashkin
D
D. Arefiev
A
A. Kazakin
Akses Cepat
Informasi Jurnal
- Tahun Terbit
- 2021
- Bahasa
- en
- Total Sitasi
- 1×
- Sumber Database
- Semantic Scholar
- DOI
- 10.1088/1742-6596/2086/1/012184
- Akses
- Open Access ✓