DOAJ Open Access 2025

Miniature MEMS Scanning Electron Microscope

Michał Krzysztof

Abstrak

Abstract: This article presents the world's first miniature MEMS scanning electron microscope. The device, thanks to its small size, low power consumption, and durable construction, can be used in previously inaccessible places, including space missions for imaging samples of cosmic dust, lunar, or Martian soil. Keywords: Miniature scanning electron microscope; Electron source; MEMS; Imaging

Topik & Kata Kunci

Highway engineering. Roads and pavements Bridge engineering Railroad engineering and operation Building construction

Penulis (1)

Michał Krzysztof

Format Sitasi

APA MLA BibTeX

Krzysztof, M. (2025). Miniature MEMS Scanning Electron Microscope. https://doi.org/10.35117/A_ENG_25_07_08_03

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Informasi Jurnal

Tahun Terbit: 2025
Sumber Database: DOAJ
DOI: 10.35117/A_ENG_25_07_08_03
Akses: Open Access ✓