Delayed Discharge Bridging Two Sputtering Modes from Modulated Pulsed Power Magnetron Sputtering (MPPMS) to Deep Oscillation Magnetron Sputtering (DOMS)
Abstrak
Delayed discharges due to electrical breakdown are observed in modulated pulsed pow er magnetron sputtering (MPPMS) plasma of titanium. The delayed discharge, which is remarkable with decreasing argon gas pressure, transforms the discharge current waveform from a standard modulated pulsed discharge current waveform to a <i>comb-like</i> discharge current waveform consisting of several pulses with high power. In addition, the delay times, consisting of statistical times and formative times in the delayed MPPMS discharges, are experimentally measured with the help of Laue plot analysis. The pressure dependence of delay times observed indicates that the delayed discharge behavior matches the breakdown characteristics well. In the present study, the delayed discharge dynamics of the <i>comb-like</i> discharge current waveform, which can be the origin of deep oscillation magnetron sputtering, are investigated based on measurement of the delay times and the characteristics of discharge current waveforms.
Topik & Kata Kunci
Penulis (13)
Masaomi Sanekata
Hiroshi Nishida
Tatsuya Watabe
Yuki Nakagomi
Yoshihiro Hirai
Nobuo Nishimiya
Masahide Tona
Hiroaki Yamamoto
Naoyuki Hirata
Keizo Tsukamoto
Keijiro Ohshimo
Fuminori Misaizu
Kiyokazu Fuke
Format Sitasi
Akses Cepat
- Tahun Terbit
- 2021
- Sumber Database
- DOAJ
- DOI
- 10.3390/plasma4020016
- Akses
- Open Access ✓