Reliability Evaluation Based on Mathematical Degradation Model for Vacuum Packaged MEMS Sensor

Vacuum packaging is used extensively in MEMS sensors for improving performance. However, the vacuum in the MEMS chamber gradually degenerates over time, which adversely affects the long-term performance of the MEMS sensor. A mathematical model for vacuum degradation is presented in this article for evaluating the degradation of vacuum packaged MEMS sensors, and a temperature-accelerated test of MEMS gyroscope with different vacuums is performed. A mathematical degradation model is developed to fit the parameters of the degradation of Q-factor over time at three different temperatures. The results indicate that the outgassing rate at 85 °C is the highest, which is 0.0531 cm²/s; the outgassing rate at 105 °C is the lowest, which is 0.0109 cm²/s; and the outgassing rate at 125 °C is in the middle, which is 0.0373 cm²/s. Due to the different mechanisms by which gas was released, the rate of degradation did not follow this rule. It will also be possible to predict the long-term reliability of vacuum packaged MEMS sensors at room temperature based on this model.