Fabrication and Characterization of a Microscale Piezoelectric Vibrator Based on Electrohydrodynamic Jet Printed PZT Thick Film

This paper proposes a novel way of preparing a PZT thick film micro vibrator using the electrohydrodynamic jet (E-Jet) printing technique. Initially, a micro piezoelectric vibrator was simulated and designed for obtaining optimized structure, which has a total thickness of less than 600 µm. Subsequently, the PZT thick film element was directly printed on the elastic body using the E-Jet printing. This method avoids the glue fabrication process involved in the bulk piezoelectric fabrication, thus avoiding the limits of voltage drops, isolating and absorbing amplitude usually occurred in the vibrator having glue interface. It was observed that B02 and B03 modes were generated at frequencies of 29.74 and 79.14 kHz, respectively, and the amplitudes of B02 and B03 modes were 406 and 176 nm, respectively. The error between the simulation and test result in the B03 modal is only 0.35%, which indicates the accuracy of the simulation analysis and the fabrication process. The PZT thick film traveling-wave micro vibrator successfully realized bidirectional rotation of a rotor, with a maximum speed of 681 rpm, which also shows a linear relationship between excitation voltage and rotary speed. This paper provides an effective method for preparing a micro piezoelectric vibrator for MEMS ultrasonic devices, which simplifies the manufacturing process and enhances the performance of the piezoelectric vibrator.