Process Chains for Micro-Manufacturing: Modeling and Case Studies

As the complexity of micro-products increases, the micro-manufacturing processes, tool setups, and measurement processes have to be more precise and efficient. Combining them in a multi-stage process chain can effectively improve production accuracy and performance and reduce limitations and production costs. This paper focuses on the process chains for the manufacturing of micro-products and presents the state of the art, highlighting the specific characteristics of the existing models of process chains for micro-manufacturing. Based on the critical review of these characteristics, an evolution of the process chain model for micro-manufacturing is proposed, considering machining, measurement/characterization, referencing processes, and their combination into a suitable sequence. The proposed model accounts for relevant aspects of micro-manufacturing, such as size effects and technological fingerprints at the microscale. This paper also discusses the hierarchical properties of multiple micro-manufacturing process chains and some specific techniques to address the critical issue of referencing processes. Furthermore, some relevant case studies involving micro-electrical discharge machining, micro-injection molding, additive manufacturing, and micro-milling are presented to demonstrate how the micro-manufacturing potentiality can be increased using process chains.