A High-Precision Active Vibration Isolation Control System: Experimental Study

Nowadays, the demand for high-precision devices is becoming more intense, thanks to the growing complexity and sophistication of modern technology and applications, including microscopy, nanomeasurement and analysis instruments. However, challenges arise because environmental factors such as vibration negatively affect their performance. An active vibration isolation system (AVIS) is one of the most recent solutions for that, but the high degree-of-freedom (DoF) nature results in it strongly suffering from unwanted interactions. Hence, in this paper, a robust decoupling controller is designed to handle the mentioned disadvantages. The system model is first presented, followed by the proposed decoupling techniques, and then, a feedback controller is designed by applying the mixed-sensitivity <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><msub><mrow><mi>H</mi></mrow><mrow><mo>∞</mo></mrow></msub></mrow></semantics></math></inline-formula> control framework. Experimental studies are conducted to investigate the effectiveness of the proposed AVIS and compare it with other systems, namely, a passive vibration isolation system, a proportional–derivative (PD)-controlled AVIS, and a robust controlled AVIS. The robustness and decoupling performance of the proposed controller are guaranteed by suppressing external vibrations and isolating interactions, and, therefore, stabilizing the system.