Media-Free and Contactless Micro-Positioning System Using Ultrasonic Levitation and Magnetic Actuators

In micro-production technology (MPT), the demand for ultra-precise machine tools has been steadily increasing. Conventional guideway systems, such as hydrostatic or aerostatic bearings, often face limitations in terms of compactness, media supply, and susceptibility to external disturbances, which restrict their applicability in next-generation precision manufacturing. In order to address these challenges, this paper presents a novel media-free, contactless, and active three-degree-of-freedom (DOF) planar positioning (guiding) system that integrates ultrasonic actuators with electromagnetic actuators. The hybrid concept combines the high load capacity and self-stabilization of double-acting ultrasonic actuators and pronounced controllability of the electromagnetic actuators. A prototype system was developed and experimentally validated. Ultrasonic actuators successfully established a stable levitation state, while electromagnetic actuators provided fine adjustment of the levitation height in the micrometer range. Load tests demonstrated that the system maintained stable levitation under an external load of 30 N. These results confirm the feasibility of the proposed approach for robust and precise positioning. The developed hybrid system therefore represents the potential for next-generation precise manufacturing machines in MPT, offering high accuracy and robustness against external disturbances.