DOAJ Open Access 2026

Experimental Characterization and Modeling of Acoustic Wave Propagation Loss Associated with SAW IDT Resonators

Hansoo Yoo Yungseon Eo

Abstrak

In this study, the physical behavior of a surface acoustic wave resonator is formulated with the aid of a distributed four-port transmission line circuit model. Propagation losses of surface acoustic waves are modeled based on frequency-variant circuit model parameters (i.e., resistance, conductance, and attenuation). Furthermore, the loss resulting from metal fingers and leakage toward the bulk substrate are modeled by means of series resistance and frequency-variant parallel conductance, respectively. In addition, the attenuation of high-frequency spurious resonances is modeled using a frequency-variant damping factor. The validity of the proposed model is verified by test filters fabricated on 42°YX-LiTaO3 (piezoelectric substrate). The S-parameters calculated using the proposed model show excellent agreement with the experimental S-parameters measured at the wafer level.

Penulis (2)

H

Hansoo Yoo

Y

Yungseon Eo

Format Sitasi

Yoo, H., Eo, Y. (2026). Experimental Characterization and Modeling of Acoustic Wave Propagation Loss Associated with SAW IDT Resonators. https://doi.org/10.26866/jees.2026.1.r.325

Akses Cepat

Lihat di Sumber doi.org/10.26866/jees.2026.1.r.325
Informasi Jurnal
Tahun Terbit
2026
Sumber Database
DOAJ
DOI
10.26866/jees.2026.1.r.325
Akses
Open Access ✓