DOAJ Open Access 2019

Micro Array Hole Formation in Glass Using Electrochemical Discharge Machining

Liang Huang Yan Cao Feng Jia Yan Lei

Abstrak

With the widespread application of non-conducting tough materials, such as glass in MEMS recent years, many difficulties have arisen in the processing of these kind of material with eigen-structure characteristics. In this paper, based on the technical advantages of electrochemical discharge machining, the mechanism of tool electrode structure and process parameters for the stability of gas film, processing efficiency and forming quality is analysed, and the machining of a glass micro-array hole is accomplished by obtaining the optimal process parameters.

Topik & Kata Kunci

Industrial electrochemistry Physical and theoretical chemistry

Penulis (4)

Liang Huang

Yan Cao

Feng Jia

Yan Lei

Format Sitasi

APA MLA BibTeX

Huang, L., Cao, Y., Jia, F., Lei, Y. (2019). Micro Array Hole Formation in Glass Using Electrochemical Discharge Machining. https://doi.org/10.20964/2019.10.44

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Informasi Jurnal

Tahun Terbit: 2019
Sumber Database: DOAJ
DOI: 10.20964/2019.10.44
Akses: Open Access ✓