DOAJ Open Access 2023

Near-Field Microwave Microscopy for 3D Surface Assessment of Manufactured Structures

D. R. Jones P. Brown G. McFarland R. Perks H. Choi +2 lainnya

Abstrak

Using near-field scanning microwave microscopy as a contact and non-contacting investigative tool for 3D surface metrology with three differing measurement modes, it has been possible to analyse structures that may be difficult for existing metrology systems. The system utilizes the small change in capacitance between a coaxial resonant probe (at around 2 GHz) ending in an open circuit tip, and the sample surface. This is measured in the frequency domain by the shift in the resonance frequency of the voltage transmission coefficient |S<sub>21</sub>|. It is also possible to investigate various materials (metallics, plastics etc.) owing to their differing dielectric properties. The probe has been tested on a computer-controlled 3D stage but is suitable for incorporation into a commercial co-ordinate measurement machine (CMM) to enhance its capability to inspect the inside surfaces of structures, e.g., threads in small bores.

Topik & Kata Kunci

Telecommunication Electric apparatus and materials. Electric circuits. Electric networks

Penulis (7)

D. R. Jones

P. Brown

G. McFarland

R. Perks

H. Choi

S. Cripps

A. Porch

Format Sitasi

APA MLA BibTeX

Jones, D.R., Brown, P., McFarland, G., Perks, R., Choi, H., Cripps, S. et al. (2023). Near-Field Microwave Microscopy for 3D Surface Assessment of Manufactured Structures. https://doi.org/10.1109/JMW.2023.3261901

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Informasi Jurnal

Tahun Terbit: 2023
Sumber Database: DOAJ
DOI: 10.1109/JMW.2023.3261901
Akses: Open Access ✓