Beyond reflection: Advancements and applications of MEMS mirrors in biomedical devices

Microelectromechanical systems (MEMS) micromirrors have become vital components in biomedical applications, driving advances in minimally invasive diagnostics and targeted therapies. We provide in this review of MEMS micromirrors focusing on their performance, utility, and adaptability in key imaging and therapeutic modalities. MEMS micromirrors, known for precise and high-speed beam control, are integral to devices such as optical coherence tomography (OCT), photoacoustic imaging, confocal and multiphoton endomicroscopy, and optogenetics. In OCT and photoacoustic imaging, they enhance resolution for early disease detection. In confocal and multiphoton endomicroscopy, they enable real-time, high-resolution cellular imaging. Optogenetics benefits from their targeted light delivery for neural modulation and therapy. While briefly outlining primary actuation mechanisms, the review emphasizes biomedical applications. By focusing on key performance aspects and real-world use cases, this article offers insights into how MEMS micromirrors are shaping next-generation biomedical devices and advancing diagnostic and therapeutic technologies.