Resolution enhancement methods in optical microscopy for dimensional optical metrology
Abstrak
In this paper, we discuss several enhancement approaches to increase the resolution and sensitivity of optical microscopy as a tool for dimensional nanometrology. Firstly, we discuss a newly developed through-focus microscopy technique providing additional phase information from the afocal images to increase the nanoscale sensitivity of classical microscopy. We also explore different routes to label-free or semiconductor compatible labelling super-resolution microscopy suitable for a broad range of technical applications. We present initial results from, a new wide-field super-resolution imaging technique enabled by Raman scattering. In addition, we discuss super-resolution imaging using NV centres in nano-diamonds as labels and their application in future reference standards.
Topik & Kata Kunci
Penulis (15)
Nouri Mohammad
Olivero Paolo
Kroker Stefanie
Käseberg Tim
Ruo-Berchera Ivano
Bodermann Bernd
Tyagi Himanshu
Roy Deb
Mukherjee Deshabrato
Siefke Thomas
Hansen Poul Erik
Rømer Astrid Tranum
Valtr Miroslav
Aprà Pietro
Petrik Peter
Akses Cepat
- Tahun Terbit
- 2025
- Sumber Database
- DOAJ
- DOI
- 10.1051/jeos/2025002
- Akses
- Open Access ✓