DOAJ Open Access 2020

Dataset on microstructural, structural and tribology characterization of TiC thin film on CpTi substrate grown by RF magnetron sputtering

Olayinka Oluwatosin Abegunde Esther Titilayo Akinlabi Philip Oluseyi Oladijo

Abstrak

The datasets in this article are supplementary to the corresponding research article [1, 2]. The planar morphology and topography of TiC thin films coated on commercially pure Titanium (CpTi) grown by RF magnetron sputtering were investigated using Field emission scanning electron microscope (FESEM) and Atomic force microscope (AFM). The mechanical properties such as Hardness and Young Modulus of the thin film coating was studied using Nanohardness. Furthermore, grazing incidence X-ray diffractometer (GIXRD) and Raman spectroscopy were used to analyse the structural and composition of the TiC thin film coating. Keywords: RF magnetron sputtering, TiC thin film, Field emission scanning electron microscope (FESEM), Atomic force microscope (AFM), Grazing incidence X-ray diffractometer (GIXRD), Raman spectroscopy, Nanohardness

Penulis (3)

O

Olayinka Oluwatosin Abegunde

E

Esther Titilayo Akinlabi

P

Philip Oluseyi Oladijo

Format Sitasi

Abegunde, O.O., Akinlabi, E.T., Oladijo, P.O. (2020). Dataset on microstructural, structural and tribology characterization of TiC thin film on CpTi substrate grown by RF magnetron sputtering. https://doi.org/10.1016/j.dib.2020.105205

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Informasi Jurnal
Tahun Terbit
2020
Sumber Database
DOAJ
DOI
10.1016/j.dib.2020.105205
Akses
Open Access ✓