In-Plane Vibration-Driven Miniature Piezoelectric Motor: Design, Modeling, and Experimental Characterization

High-speed miniature rotary actuators are critical components in compact, high-performance systems. However, conventional electromagnetic micromotors face a prominent trade-off between miniaturization and output performance, which restricts their applicability in highly integrated devices. To address this challenge, a novel high-speed rotary piezoelectric ultrasonic motor is proposed. The proposed motor consists of a titanium alloy metal body with offset driving teeth, piezoelectric ceramic plates, two conical rotors, a compression spring, an output shaft, and a fastening sleeve. Four PZT-8 plates are bonded to the periphery of the metal body and excited to generate in-plane bending vibration modes; these vibrations are then transformed into unidirectional rotary motion through the periodic contraction and expansion of the offset driving teeth and frictional contact with the rotors. The operating principle and structural parameters of the proposed motor were analyzed and optimized using finite element analysis (FEA), including modal, harmonic response, and transient analyses. A prototype was fabricated to evaluate its mechanical properties. The stator has a compact size of 12 mm × 12 mm × 4 mm and a mass of 2.3 g. Experimental results demonstrate that under an excitation voltage of 350 Vp-p at the resonant frequency of 28.6 kHz, the motor achieves a maximum rotational speed of 4720 rpm and a maximum stall torque of 0.36 mN·m. With its simple structure, compact size, lightweight design, and excellent output performance, the proposed ultrasonic motor provides a solution for compact high-speed rotary actuation.