CrossRef Open Access 1979 53 sitasi

Depth Profiling of n‐Type Dopants in Si and GaAs Using Cs+ Bombardment Negative Secondary Ion Mass Spectrometry in Ultrahigh Vacuum

Charles W. Magee

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Charles W. Magee

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Magee, C.W. (1979). Depth Profiling of n‐Type Dopants in Si and GaAs Using Cs+ Bombardment Negative Secondary Ion Mass Spectrometry in Ultrahigh Vacuum. https://doi.org/10.1149/1.2129104

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Lihat di Sumber doi.org/10.1149/1.2129104

Informasi Jurnal

Tahun Terbit: 1979
Bahasa: en
Total Sitasi: 53×
Sumber Database: CrossRef
DOI: 10.1149/1.2129104
Akses: Open Access ✓