CrossRef Open Access 2022

Phase Resolved Plasma Dynamics Of A Capacitively Coupled Plasma Using Particle Trajectory Analysis

C.W. Kim H.H. Kim J.H. Shin G.W. Park H.J. Lee

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Penulis (5)

C.W. Kim

H.H. Kim

J.H. Shin

G.W. Park

H.J. Lee

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Kim, C., Kim, H., Shin, J., Park, G., Lee, H. (2022). Phase Resolved Plasma Dynamics Of A Capacitively Coupled Plasma Using Particle Trajectory Analysis. https://doi.org/10.1109/icops45751.2022.9812989

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Informasi Jurnal

Tahun Terbit: 2022
Bahasa: en
Sumber Database: CrossRef
DOI: 10.1109/icops45751.2022.9812989
Akses: Open Access ✓