Raman Spectroscopy and Electron Microscopy Studies of Ga FIB and Post-FIB Ar Ion Milling's Impact on Si TEM Specimens

Bonifacio, C., Tan, S., Nowakowski, P., Ray, M., Fischione, P. (2022). Raman Spectroscopy and Electron Microscopy Studies of Ga FIB and Post-FIB Ar Ion Milling's Impact on Si TEM Specimens. https://doi.org/10.1017/s143192762200112x

Bonifacio, CS, et al.. "Raman Spectroscopy and Electron Microscopy Studies of Ga FIB and Post-FIB Ar Ion Milling's Impact on Si TEM Specimens". CrossRef, 2022. doi:10.1017/s143192762200112x.

@article{bonifacio2022, author = {CS Bonifacio and S Tan and P Nowakowski and ML Ray and PE Fischione}, title = {Raman Spectroscopy and Electron Microscopy Studies of Ga FIB and Post-FIB Ar Ion Milling's Impact on Si TEM Specimens}, year = {2022}, journal = {CrossRef}, doi = {10.1017/s143192762200112x}, url = {https://doi.org/10.1017/s143192762200112x}, }

Raman Spectroscopy and Electron Microscopy Studies of Ga FIB and Post-FIB Ar Ion Milling's Impact on Si TEM Specimens

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