CrossRef Open Access 2003 15 sitasi

Surprisingly large apparent profile shifts of As and Sb markers in Si bombarded with ultra-low-energy Cs ion beams

Y Kataoka M Shigeno Y Tada K Wittmaack

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Penulis (4)

Y Kataoka

M Shigeno

Y Tada

K Wittmaack

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Kataoka, Y., Shigeno, M., Tada, Y., Wittmaack, K. (2003). Surprisingly large apparent profile shifts of As and Sb markers in Si bombarded with ultra-low-energy Cs ion beams. https://doi.org/10.1016/s0169-4332(02)00670-0

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Informasi Jurnal

Tahun Terbit: 2003
Bahasa: en
Total Sitasi: 15×
Sumber Database: CrossRef
DOI: 10.1016/s0169-4332(02)00670-0
Akses: Open Access ✓