CrossRef Open Access 2001 3 sitasi

Low energy Cs+ and Cl− ion implantation into Si — SIMS investigations

J Hereć J Sielanko J Filiks M Sowa

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Penulis (4)

J Hereć

J Sielanko

J Filiks

M Sowa

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Hereć, J., Sielanko, J., Filiks, J., Sowa, M. (2001). Low energy Cs+ and Cl− ion implantation into Si — SIMS investigations. https://doi.org/10.1016/s0042-207x(01)00268-8

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Informasi Jurnal

Tahun Terbit: 2001
Bahasa: en
Total Sitasi: 3×
Sumber Database: CrossRef
DOI: 10.1016/s0042-207x(01)00268-8
Akses: Open Access ✓