CrossRef Open Access 2004

Secondary ion formation/survival during the initial stages of sputtering Si and SiO2 with Cs+

P VANDERHEIDE

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P VANDERHEIDE

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VANDERHEIDE, P. (2004). Secondary ion formation/survival during the initial stages of sputtering Si and SiO2 with Cs+. https://doi.org/10.1016/s0039-6028(04)00210-9

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Informasi Jurnal

Tahun Terbit: 2004
Bahasa: en
Sumber Database: CrossRef
DOI: 10.1016/s0039-6028(04)00210-9
Akses: Open Access ✓