CrossRef Open Access 2025 2 sitasi

Efficient white light interferometry for wafer‑scale high aspect ratio structures

Weihao Zhang Hangying Zhang Boyu Wang Kai Meng Peihuang Lou

Lihat Sumber DOI

Penulis (5)

Weihao Zhang

Hangying Zhang

Boyu Wang

Kai Meng

Peihuang Lou

Format Sitasi

APA MLA BibTeX

Zhang, W., Zhang, H., Wang, B., Meng, K., Lou, P. (2025). Efficient white light interferometry for wafer‑scale high aspect ratio structures. https://doi.org/10.1016/j.measurement.2025.117988

Akses Cepat

PDF tidak tersedia langsung

Cek di sumber asli →

Lihat di Sumber doi.org/10.1016/j.measurement.2025.117988

Informasi Jurnal

Tahun Terbit: 2025
Bahasa: en
Total Sitasi: 2×
Sumber Database: CrossRef
DOI: 10.1016/j.measurement.2025.117988
Akses: Open Access ✓