CrossRef Open Access 2013

Measurement technique of telecentricity for the illumination system in the 193nm photolithography

Shunping Shi Yiping Cao Zhenfen Huang Yang Li

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Shunping Shi

Yiping Cao

Zhenfen Huang

Yang Li

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Shi, S., Cao, Y., Huang, Z., Li, Y. (2013). Measurement technique of telecentricity for the illumination system in the 193nm photolithography. https://doi.org/10.1016/j.ijleo.2012.09.027

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Tahun Terbit: 2013
Bahasa: en
Sumber Database: CrossRef
DOI: 10.1016/j.ijleo.2012.09.027
Akses: Open Access ✓