arXiv
Open Access
2020
NEG pumps: Sorption mechanisms and applications
P. Manini
E. Maccallini
Abstrak
This paper reports the main physical and chemical properties of NEG materials, sorption mechanisms and use of NEG pumps from high to extreme high vacuums.
Topik & Kata Kunci
Penulis (2)
P
P. Manini
E
E. Maccallini
Akses Cepat
Informasi Jurnal
- Tahun Terbit
- 2020
- Bahasa
- en
- Sumber Database
- arXiv
- Akses
- Open Access ✓